Polymer-based gas sensor on a thermally stable micro-cantilever
نویسندگان
چکیده
منابع مشابه
Couple Stress Effect on Micro/Nanocantilever-based Capacitive Gas Sensor
Micro/nanocantilevers have been employed as sensors in many applications including chemical and biosensing. Due to their high sensitivity and potential for scalability, miniature sensing systems are in wide use and will likely become more prevalent in micro/nano-electromechanical systems (M-NEMSs). This paper is mainly focused on the use of sensing systems that employ micro/nano-size cantilever...
متن کاملPeizoresistive Mems Cantilever based Co2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
متن کاملPeizoresistive MEMS Cantilever based CO2 Gas Sensor
A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...
متن کاملA Short Review on Fabrication Methods of Micro-Cantilever for Ionic Electroactive Polymer Sensors/Actuators
Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations...
متن کاملThermally Stable Gel Polymer Electrolytes
Hyperstructured Organic Materials Research Center, Department of Chemical Engineering, Sogang University, Seoul 121-742, Korea Samsung SDI Company, Limited, Energy Development Team, Corporate Research and Development Center, Yongin-City, Kyonggi-Do 449-742, Korea Battery and Fuel Cell Research Center, Korea Institute of Science and Technology, Seoul 130-650, Korea Center for Electrochemical Eng...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2010
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2010.09.038